Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Rectangular 75 50 100 2.8 1 5 225 200 250 28 23 33 Tip Specification
Geometry: Standard (Steep) Tip Height (h): 10 - 15µm Front Angle (FA): 25 ± 2.5º Back Angle (BA): 15 ± 2.5 º Side Angle (SA): 22.5 ± 2.5 º Tip Radius (Nom): 8 nm Tip Radius (Max): 12 nm Tip SetBack (TSB)(Nom): 15 µm Tip Set Back (TSB)(RNG): 5 - 25 µm Cantilever Specification
Material: 0.01 - 0.025 Ωcm Antimony (n) doped Si Geometry: Rectangular Cantilevers Number: 1 Cantilever Thickness (Nom): 2.75 µm Cantilever Thickness (RNG): 2.0 - 3.5 µm
规格参数