Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Rectangular 190 130 250 48 24 96 225 250 200 38 33 43 Tip Specification
Geometry: Standard (Steep) Tip Height (h): 10 - 15µm Front Angle (FA): 25 ± 2.5º Back Angle (BA): 15 ± 2.5 º Side Angle (SA): 22.5 ± 2.5 º Tip Radius (Nom): 8 nm Tip Radius (Max): 12 nm Tip SetBack (TSB)(Nom): 15 µm Tip Set Back (TSB)(RNG): 5 - 25 µm Cantilever Specification
Material: 0.01 - 0.025 Ωcm Antimony (n) doped Si Geometry: Rectangular Cantilevers Number: 1 Cantilever Thickness (Nom): 7 µm Cantilever Thickness (RNG): 6.5 - 7.5 µm
规格参数