Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Rectangular 300 200 400 40 20 80 125 115 135 40 38 42 Tip Specification
This probe uses a rotated tip to provide a more symmetric representation of features over 200nm.
Geometry: Rotated (Symmetric) Tip Height (h): 10 - 15µm Front Angle (FA): 15 ± 2º Back Angle (BA): 25 ± 2 º Side Angle (SA): 17.5 ± 2 º Tip Radius (Nom): 8 nm Tip Radius (Max): 12 nm Tip SetBack (TSB)(Nom): 9.5 µm Tip Set Back (TSB)(RNG): 7 - 12 µm Cantilever Specification
Material: 0.01 - 0.025 Ωcm Antimony (n) doped Si Geometry: Rectangular Cantilevers Number: 1 Cantilever Thickness (Nom): 3.4 µm Cantilever Thickness (RNG): 2.65 - 4.15 µm
规格参数