Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Triangular 150 100 200 0.7 0.35 1.4 70 65 75 10 5 15 Cantilever Specification
Material: Silicon Nitride Geometry: Triangular Cantilevers Number: 1 Cantilever Thickness (Nom): 0.6 µm Cantilever Thickness (RNG): 0.55 - 0.65 µm Back Side Coating: Reflective Gold Top Layer Back: 45 ± 5 nm of Ti/Au
规格参数