Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. A Triangular 22 15 30 0.07 0.025 0.14 175 170 180 22 17 27 B Rectangular 15 10 20 0.02 0.005 0.04 210 205 215 20 15 25 C Triangular 7 4 10 0.01 0.005 0.02 310 305 315 20 15 25 D Triangular 15 10 20 0.03 0.01 0.06 225 220 230 20 15 25 E Triangular 38 26 50 0.1 0.05 0.2 140 135 145 18 13 23 F Triangular 125 90 160 0.6 0.3 1.2 85 80 90 18 13 23 Tip Specification
Geometry: Rotated (Symmetric) Tip Height (h): 2.5 - 8.0µm Front Angle (FA): 15 ± 2.5º Back Angle (BA): 25 ± 2.5 º Side Angle (SA): 17.5 ± 2.5 º Tip Radius (Nom): 20 nm Tip Radius (Max): 60 nm Tip SetBack (TSB)(Nom): 4 µm Tip Set Back (TSB)(RNG): 0 - 7 µm Cantilever Specification
Material: Silicon Nitride Geometry: Rectangular & Triangular Cantilevers Number: 6 Cantilever Thickness (Nom): 0.55 µm Cantilever Thickness (RNG): 0.5 - 0.6 µm Back Side Coating: Reflective Gold Top Layer Back: 45 ± 5 nm of Ti/Au
规格参数