Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. A Triangular 65 50 80 0.35 0.175 0.7 120 115 125 25 20 30 B Triangular 23 16 28 0.12 0.06 0.24 205 200 210 40 35 45 C Triangular 56 40 75 0.24 0.12 0.48 120 115 125 20 15 25 D Triangular 18 12 24 0.06 0.03 0.12 205 200 210 25 20 30 Tip Specification
Geometry: Rotated (Symmetric) Tip Height (h): 2.5 - 8.0µm Front Angle (FA): 15 ± 2.5º Back Angle (BA): 25 ± 2.5 º Side Angle (SA): 22.5 ± 2.5 º Tip Radius (Nom): 2 nm Tip Radius (Max): 12 nm Tip SetBack (TSB)(Nom): 4 µm Tip Set Back (TSB)(RNG): 0 - 7 µm Cantilever Specification
Material: Silicon Nitride Geometry: Triangular Cantilevers Number: 4 Cantilever Thickness (Nom): 0.6 µm Cantilever Thickness (RNG): 0.55 - 0.65 µm Back Side Coating: Reflective Gold Top Layer Back: 45 ± 5 nm of Ti/Au
规格参数
