Cantilever Type 1 Specifications Spring k (N/m 0.03 (0.009 - 0.1) Freq (kHz) 37 (19 - 73) Length (µm) 60 (50 - 70) Width (µm) 30 (29 - 31) Thickness (µm) 0.15 (0.1 - 0.2) Shape Rectangular Material Silicon nitride Reflex Coating (nm) Cr/Au (5/30)
Cantilever Type 2 Specifications Spring k (N/m 0.006 (0.002 - 0.02) Freq (kHz) 13 (7 - 21) Length (µm) 100 (90 - 110) Width (µm) 30 (29 - 31) Thickness (µm) 0.15 (0.1 - 0.2) Shape Rectangular Material Silicon nitride Reflex Coating (nm) Cr/Au (5/30)
Tip Specifications Tip radius (nm) 30 Tip height (µm) 7 Front angle (°) 0 +/- 1 Back angle (°) 45 +/- 1 Side angle (°) 45 +/- 1 Tip shape 2-sided Tip material Silicon nitride Tip coating (nm) Cr/Au (5/20)
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