Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Triangular 300 200 400 0.8 0.4 1.2 42 39 45 40 38 42 Tip Specification
Geometry: Rotated (Symmetric) Tip Height (h): 2.5 - 8µm Front Angle (FA): 15 ± 2.5º Back Angle (BA): 25 ± 2.5 º Side Angle (SA): 17.5 ± 2.5 º Tip Radius (Nom): 5 nm Tip Radius (Max): 12 nm Tip SetBack (TSB)(Nom): 5 µm Tip Set Back (TSB)(RNG): 0 - 7 µm Cantilever Specification
Material: Silicon Nitride Geometry: Triangular Cantilevers Number: 1 Cantilever Thickness (Nom): 0.3 µm Cantilever Thickness (RNG): 0.25 - 0.35 µm Back Side Coating: Reflective Gold Top Layer Back: 60 ± 10 nm of Ti/Au
规格参数