Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Triangular 450 300 600 1.8 1 3 30 27 33 33 30 36 Tip Specification
Geometry: Rotated (Symmetric) Tip Height (h): 2.5 - 8µm Front Angle (FA): 15 ± 2.5º Back Angle (BA): 25 ± 2.5 º Side Angle (SA): 17.5 ± 2.5 º Tip Radius (Nom): 5 nm Tip Radius (Max): 12 nm Tip SetBack (TSB)(Nom): 5 µm Tip Set Back (TSB)(RNG): 0 - 7 µm Cantilever Specification
Material: Silicon Nitride Geometry: Triangular Cantilevers Number: 1 Cantilever Thickness (Nom): 0.3 µm Cantilever Thickness (RNG): 0.25 - 0.35 µm Back Side Coating: Reflective Gold Top Layer Back: 60 ± 10 nm of Ti/Au
规格参数