Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Triangular 1400 800 2000 18 10 25 27 24 30 33 30 36 Tip Specification
Geometry: Rotated (Symmetric) Tip Height (h): 2.5 - 8µm Front Angle (FA): 15 ± 2.5º Back Angle (BA): 25 ± 2.5 º Side Angle (SA): 17.5 º Tip Radius (Nom): 5 nm Tip Radius (Max): 12 nm Tip SetBack (TSB)(Nom): 5 µm Tip Set Back (TSB)(RNG): 0 - 7 µm Cantilever Specification
Material: Silicon Nitride Geometry: Triangular Cantilevers Number: 1 Cantilever Thickness (Nom): 0.58 µm Cantilever Thickness (RNG): 0.53 - 0.63 µm Back Side Coating: Reflective Aluminum Top Layer Back: 100 ± 10 nm of Al
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